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Proceedings Paper

Ultrashort pulse laser patterning of a transistor based on carbon nanotube thin-films
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Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350U; doi: 10.1117/12.2213296
Show Author Affiliations
Jürgen Sotrop, Hochschule für Angewandte Wissenschaften München (Germany)
Heinz P. Huber, Hochschule für Angewandte Wissenschaften München (Germany)


Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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