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Proceedings Paper

Automation in semiconductor production minienvironments, flexibility and information flow
Author(s): Ralf Dudde; Peter Staudt-Fischbach; Olaf Herzog
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Paper Abstract

The productivity of semiconductor fabs can be improved significantly by the combined action of several measures: Usage of expensive resources only at the point of use, like limiting the generation of a particlefree clean room environment to the immediate surrounding of wafers and wafer processed by usage of mini-environments and SMIF-wafer capsulation. Improvement of the logistic and material flow by an appropriate computer control system in the production line especially for a flexible IC- production. With its new Institute of Silicon Technology (ISiT) in Itzehoe the Fraunhofer-Society for applied research is now realizing an advanced CMOS pilot-line starting with a 0.5 (mu) process that is dedicated from the very beginning for an optimum in flexibility, productivity and lowest running costs. The complete concept for mini- environments, SMIF upgrade of the equipment and production control software was developed in a cooperation between the Fraunhofer institutes for Silicon Technology (ISiT) and Production automation (IPA). The Jenoptic, Jena, was chosen as supplier of SMIF components, mini-environments and identification software. The Line-Information- System, which operates as a low-cost manufacturing execution system, has been developed by the Fraunhofer-IPA using a central database system and client applications to access it. It tracks the actual work in progress in the fab, maintains equipment and lot history and allows production and cost monitoring and optimization.

Paper Details

Date Published: 19 September 1995
PDF: 10 pages
Proc. SPIE 2637, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing, (19 September 1995); doi: 10.1117/12.221312
Show Author Affiliations
Ralf Dudde, Fraunhofer-Institute for Silicon Technology (Germany)
Peter Staudt-Fischbach, Fraunhofer-Institute for Silicon Technology (Germany)
Olaf Herzog, Fraunhofer-Institute for Production-Technology and Automation (Germany)


Published in SPIE Proceedings Vol. 2637:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
Anant G. Sabnis; Ivo J. Raaijmakers, Editor(s)

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