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Proceedings Paper

Hyperspectral scanning white light interferometry based on compressive imaging
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Paper Abstract

We have developed a compressive hyperspectral imaging system that is based on single-pixel camera architecture. We have incorporated the developed system in a scanning white-light interferometer (SWLI) and showed that replacing SWLI’s CCD-based camera by the compressive hyperspectral imaging system, we have access to high-resolution multispectral images of interferometer’s fringes. Using these multi-spectral images, the system is capable of simultaneous spectroscopy of the surface, which can be used, for example, to eliminate the effect of surface contamination and providing new spectral information for fringe signal analysis which could be used to reduce the need for vertical scan, therefore making height measurement more tolerant to object’s position.

Paper Details

Date Published: 15 March 2016
PDF: 7 pages
Proc. SPIE 9761, Emerging Digital Micromirror Device Based Systems and Applications VIII, 97610H (15 March 2016); doi: 10.1117/12.2213101
Show Author Affiliations
Mohammad Azari, The Univ. of North Carolina at Charlotte (United States)
Nasim Habibi, The Univ. of North Carolina at Charlotte (United States)
Mehrdad Abolbashari, Optoniks Corp. (United States)
Faramarz Farahi, The Univ. of North Carolina at Charlotte (United States)


Published in SPIE Proceedings Vol. 9761:
Emerging Digital Micromirror Device Based Systems and Applications VIII
Michael R. Douglass; Philip S. King; Benjamin L. Lee, Editor(s)

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