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Proceedings Paper

MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Author(s): Jan Grahmann; André Dreyhaupt; Christian Drabe; Richard Schrödter; Jörg Kamenz; Thilo Sandner
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Paper Abstract

Two new technological process flows for the piezoresistive position detection of resonant and quasistatic micro scanning mirrors were developed to increase sensitivities by a factor of 3:6 compared to former sensors, improve signal to noise ratio of the sensor signal and to allow controlled feedback loop operation. The sensor types use differently doped and deposited silicon. One is based on single crystal silicon with a pn-junction to isolate the active sensor area from the device layer silicon, the other one is based on a deposited and structured polysilicon. The sensor characteristics are compared including light, temperature dependence and reliability results.

Paper Details

Date Published: 15 March 2016
PDF: 11 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976006 (15 March 2016); doi: 10.1117/12.2212965
Show Author Affiliations
Jan Grahmann, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
André Dreyhaupt, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Christian Drabe, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Richard Schrödter, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Jörg Kamenz, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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