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Proceedings Paper

Novel high-power Nd:YLF laser for CVD-diamond micromachining
Author(s): Ronald D. Schaeffer
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Paper Abstract

Chemical vapor deposited diamond films have been grown successfully for a number of years, and through advances in processing technology, tooling investments, and volume, growth processes have become affordable for many commercial purposes. The remarkable properties of diamond, including hardness, thermal conductivity and optical properties, make it an ideal choice of material in many applications. A key to affordability of diamond products for commercial purposes is the ability to machine the films into desirable shapes. Because of diamond's hardness, photons are an obvious choice of 'cutting medium'. This paper will discuss the available laser sources and in what circumstances they are being used to achieve desired results. Focus will then be placed on a new Nd:YLF laser based system which was built specifically to machine CVD diamond at high speed and produce low taper angle features with UV excimer laser-like quality.

Paper Details

Date Published: 19 September 1995
PDF: 10 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221294
Show Author Affiliations
Ronald D. Schaeffer, Resonetics, Inc. (United States)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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