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Proceedings Paper

Characterization of electroformed nickel microstructures
Author(s): Qian Shi; Shih-Chia Chang; Michael W. Putty; David B. Hicks
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Paper Abstract

Electroformed nickel resonators were constructed and tested in the temperature range of - 40 to 110 degrees C. The temperature sensitivities of the resonant frequencies are - 150 ppm/degrees C, - 200 ppm/degrees C, and - 3000 ppm/degrees C for cantilever beams, ring structures, and clamped-clamped bridges, respectively. The built-in stress for the bridge was estimated to be approximately 2 X 109 dyne/cm2. No resonant frequency shift was detected after long-term (over 60 days), large amplitude vibration. This implies that the electroformed nickel is a viable material for the construction of resonant mechanical sensors.

Paper Details

Date Published: 19 September 1995
PDF: 9 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221293
Show Author Affiliations
Qian Shi, General Motors Corp. (United States)
Shih-Chia Chang, General Motors Corp. (United States)
Michael W. Putty, General Motors Corp. (United States)
David B. Hicks, General Motors Corp. (United States)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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