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Proceedings Paper

Tunneling tip protection for a bulk micromachined accelerometer
Author(s): Paul M. Zavracky; Bob McClelland; Jianchao Wang; Frank T. Hartley
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Paper Abstract

Ultrasensitive accelerometers are needed by NASA for the measurement of orbital drag. We have designed an accelerometer capable of measuring 10-8. In this paper, a method for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip is presented. To meet sensitivity sepcifications, a weak spring and large mass are needed. However, these represent a delicate mechanism and a method of protection is provided by electrostatically clamping the proof mass in a fixed position. The effectiveness of the electrostatic clamp has been measured. It is found that clamping against an acceleration of 200 g is possible with voltages as low as 30 volts.

Paper Details

Date Published: 19 September 1995
PDF: 7 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221289
Show Author Affiliations
Paul M. Zavracky, Northeastern Univ. (United States)
Bob McClelland, Northeastern Univ. (United States)
Jianchao Wang, Northeastern Univ. (United States)
Frank T. Hartley, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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