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Proceedings Paper

Fabrication of bulk silicon holding structures for mounting of optical fibers in v-grooves
Author(s): Carola Strandman; Ylva Baecklund
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Paper Abstract

A set of micromachined structures for holding optical fibers in anisotropically etched v- grooves has been produced. The structures are made of bulk silicon and etched in the same etch step as the aligning v-grooves, using the photo voltaic electrochemical etch stop technique (PHET). Most etching was performed in KOH solutions, however, a shallow investigation was made on the PHET technique in tetra methyl ammonium hydroxide. The structures were produced in a variety of shapes based on cantilever beams and doubly clamped bridges. They facilitate the mounting of optical fibers substantially and guide the fibers into position in the grooves.

Paper Details

Date Published: 19 September 1995
PDF: 7 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221286
Show Author Affiliations
Carola Strandman, Uppsala Univ. (Sweden)
Ylva Baecklund, Uppsala Univ. (Sweden)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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