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Proceedings Paper

Quantitative phase contrast imaging using a Nomarski microscope with variable shear distance
Author(s): Claas Falldorf; Mostafa Agour; Jonas Kötter; Ralf B. Bergmann
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Paper Abstract

We present a Nomarski microscope with variable shear distance that allows for determining the full complex modulation function including the quantitative phase contrast that a specimen imposes on incident light, rather than only its differential phase contrast. The system preserves all beneficial properties of the Nomarski setup with respect to coherence and stability. Hence, we can measure the quantitative phase contrast under Köhler illumination with full condenser aperture and without vibration isolation. We will explain the system, give an analysis of the coherence requirements and provide an example from the field of MEMS inspection.

Paper Details

Date Published: 9 March 2016
PDF: 7 pages
Proc. SPIE 9718, Quantitative Phase Imaging II, 97182I (9 March 2016); doi: 10.1117/12.2212757
Show Author Affiliations
Claas Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Mostafa Agour, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Aswan Univ. (Egypt)
Jonas Kötter, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Ralf B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. of Bremen (Germany)


Published in SPIE Proceedings Vol. 9718:
Quantitative Phase Imaging II
Gabriel Popescu; YongKeun Park, Editor(s)

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