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Proceedings Paper

Fabrication issues in micromachined tunable optical filters
Author(s): James F. Klemic; J. Marcos Sirota; Mehran Mehregany
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Paper Abstract

Prototypes of micromachined tunable infrared optical filters are being produced. Micromachining silicon for use in these filters requires the integration of multilayer dielectric optical coatings such as ZnSe/ThF4. These coatings are novel materials for integration with microlithographic processing. Devices were engineered and a process flow was developed to avoid contaminating processing tools with the coating. A method for patterning the coating was developed. Low-temperature bonding techniques have been explored and tested. Fabrication issues for these micromachined devices are discussed.

Paper Details

Date Published: 19 September 1995
PDF: 12 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221270
Show Author Affiliations
James F. Klemic, Case Western Reserve Univ. (United States)
J. Marcos Sirota, NASA Goddard Space Flight Ctr. (United States)
Mehran Mehregany, Case Western Reserve Univ. (United States)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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