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Proceedings Paper

Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate
Author(s): M. Stolze; T. Herrmann; J. A. L'huillier
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Paper Abstract

Characteristics by laser micromachining of congruent, stoichiometric and doped lithium niobate by using ultrashort laser pulses with different wavelengths from ultraviolet up to infrared were investigated. The ablation thresholds were determined in dependence of c+-side and accordingly c-side. The strong impact of crystal orientation by micromachining lithium niobate will be additionally shown by the use of a high pulse repetition rate of 1000 kHz. Furthermore, we demonstrate the advantage of processing smooth ridges with high-repetition UV picosecond laser-pulses in combination of post-processing thermal annealing and a low-loss ridge waveguide in congruent LiNbO3 will be demonstrated.

Paper Details

Date Published: 14 March 2016
PDF: 11 pages
Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350O (14 March 2016); doi: 10.1117/12.2212531
Show Author Affiliations
M. Stolze, Photonik-Zentrum Kaiserslautern e.V. (Germany)
Research Ctr. Optimas (Germany)
T. Herrmann, Photonik-Zentrum Kaiserslautern e.V. (Germany)
Research Ctr. Optimas (Germany)
J. A. L'huillier, Photonik-Zentrum Kaiserslautern e.V. (Germany)
Research Ctr. Optimas (Germany)


Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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