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Proceedings Paper

Ultrafast laser ablation of transparent materials
Author(s): Lara Bauer; Simone Russ; Myriam Kaiser; Malte Kumkar; Birgit Faißt; Rudolf Weber; Thomas Graf
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Paper Abstract

The present work investigates the influence of the pulse duration and the temporal spacing between pulses on the ablation of aluminosilicate glass by comparing the results obtained with pulse durations of 0.4 ps and 6 ps. We found that surface modifications occur already at fluences below the single pulse ablation threshold and that laser-induced periodic surface structures (LIPSS) emerge as a result of those surface modifications. For 0.4 ps the ablation threshold fluences is lower than for 6 ps. Scanning electron micrographs of LIPSS generated with 0.4 ps exhibit a more periodic and less coarse structure as compared to structures generated with 6 ps. Furthermore we report on the influence of temporal spacing between the pulses on the occurrence of LIPSS and the impact on the quality of the cutting edge. Keywords: LIPSS,

Paper Details

Date Published: 14 March 2016
PDF: 10 pages
Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350X (14 March 2016); doi: 10.1117/12.2212449
Show Author Affiliations
Lara Bauer, TRUMPF Laser GmbH (Germany)
Univ. Stuttgart (Germany)
Simone Russ, TRUMPF Laser GmbH (Germany)
Myriam Kaiser, TRUMPF Laser- und Systemtechnik GmbH (Germany)
Malte Kumkar, TRUMPF Laser- und Systemtechnik GmbH (Germany)
Birgit Faißt, TRUMPF Laser- und Systemtechnik GmbH (Germany)
Rudolf Weber, Univ. Stuttgart (Germany)
Thomas Graf, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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