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Proceedings Paper

Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator
Author(s): Shen-Che Huang; Kuo-Bin Hong; Tien-Chang Lu; Sailing He
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Paper Abstract

We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.

Paper Details

Date Published: 15 March 2016
PDF: 6 pages
Proc. SPIE 9757, High Contrast Metastructures V, 97570C (15 March 2016); doi: 10.1117/12.2212390
Show Author Affiliations
Shen-Che Huang, National Chiao Tung Univ. (Taiwan)
Kuo-Bin Hong, National Chiao Tung Univ. (Taiwan)
Tien-Chang Lu, National Chiao Tung Univ. (Taiwan)
Sailing He, KTH Royal Institute of Technology (Sweden)

Published in SPIE Proceedings Vol. 9757:
High Contrast Metastructures V
Connie J. Chang-Hasnain; David Fattal; Fumio Koyama; Weimin Zhou, Editor(s)

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