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Proceedings Paper

Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures
Author(s): Martin Hammerschmidt; Sven Herrmann; Jan Pomplun; Sven Burger; Frank Schmidt
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Paper Abstract

Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.

Paper Details

Date Published: 4 March 2016
PDF: 9 pages
Proc. SPIE 9742, Physics and Simulation of Optoelectronic Devices XXIV, 97420M (4 March 2016); doi: 10.1117/12.2212367
Show Author Affiliations
Martin Hammerschmidt, Zuse Institute Berlin (Germany)
Sven Herrmann, Zuse Institute Berlin (Germany)
Jan Pomplun, JCMwave GmbH (Germany)
Sven Burger, Zuse Institute Berlin (Germany)
JCMwave GmbH (Germany)
Frank Schmidt, Zuse Institute Berlin (Germany)
JCMwave GmbH (Germany)


Published in SPIE Proceedings Vol. 9742:
Physics and Simulation of Optoelectronic Devices XXIV
Bernd Witzigmann; Marek Osiński; Yasuhiko Arakawa, Editor(s)

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