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Proceedings Paper

Polymer strip-loaded waveguides on ALD-TiO2 films
Author(s): Leila Ahmadi; Ville Kontturi; Janne Laukkanen; Markku Kuittinen; Jyrki Saarinen; Seppo Honkanen; Matthieu Roussey
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Paper Abstract

We propose and demonstrate a low cost, large area, and mass production compatible method to fabricate strip-loaded waveguide structures. The structure is fabricated by combination of Atomic Layer Deposition and replication technique without applying any etching process to form the strip. The waveguide was realized in ring resonator configuration which eases the characterization process. The guiding layer is a 200 nm-thick TiO2 layer integrated with polymer strips to load light in the high index thin film. Due to the characteristic of the applied fabrication technique, achieving a very low propagation losses is expected.

Paper Details

Date Published: 16 March 2016
PDF: 6 pages
Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590D (16 March 2016); doi: 10.1117/12.2212324
Show Author Affiliations
Leila Ahmadi, Univ. of Eastern Finland (Finland)
Ville Kontturi, Univ. of Eastern Finland (Finland)
Janne Laukkanen, Univ. of Eastern Finland (Finland)
Markku Kuittinen, Univ. of Eastern Finland (Finland)
Jyrki Saarinen, Univ. of Eastern Finland (Finland)
Seppo Honkanen, Univ. of Eastern Finland (Finland)
Matthieu Roussey, Univ. of Eastern Finland (Finland)

Published in SPIE Proceedings Vol. 9759:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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