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Proceedings Paper

Spatial resolution limits of an optical profiler
Author(s): Katherine Creath
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Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22123
Show Author Affiliations
Katherine Creath, WYKO Corp. (United States)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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