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Proceedings Paper

Development of a three-dimensional angle errors detection and compensation system for two-dimensional stage
Author(s): Qiang-Xian Huang; Ya-Kui Bian; Chen Chen; Rui-Jun Li
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Paper Abstract

In order to compensate three-dimensional (3D) angle errors of two-dimensional (2D) stage in motion, a 3D angle errors detection and compensation system using a modified DVD pick-up head has been developed in this paper. The modified DVD pick-up head, which consists of a commercial DVD pick-up head without objective lens and voice coil motor, is used as an angle sensor. The mechanism of the angle sensor is based on optical auto-collimation, and each sensor can detect two deflection angles of the stage simultaneously. Utilizing the angle error information obtained by two angle sensors which are set along X and Y moving direction respectively, the controlling system adjusts the nano-positioning stage by controlling the piezoelectric ceramic actuators’ movement to compensate the angle errors of the stage. This system can achieve the measurement and compensation of yaw angle error, pitch angle error and roll angle error of the stage. Experimental results show that the angle detection range of this system is ±110", the resolution is about 0.2", and the repeatability error is about 2″. After compensating, the 3D angle errors of 2D stage can be controlled within 3″. This system has the advantages of compact structure, low cost, etc.

Paper Details

Date Published: 26 January 2016
PDF: 6 pages
Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 990309 (26 January 2016); doi: 10.1117/12.2212195
Show Author Affiliations
Qiang-Xian Huang, Hefei Univ. of Technology (China)
Ya-Kui Bian, Hefei Univ. of Technology (China)
Chen Chen, Hefei Univ. of Technology (China)
Rui-Jun Li, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 9903:
Seventh International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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