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Proceedings Paper

Energy spectra of electrons emitted from samples with an internal electric field
Author(s): Jadwiga Olesik; Bogdan Calusinski; Zygmunt Olesik
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Paper Abstract

This work is concerned with electron emission induced by an electric field and photoemission assisted by the field. The applied samples were emitters in the shape of semiconducting films evaporated on both sides of a glass substrate of thickness 0,2 mm. One side was an emitting surface whereas the other was a field electrode. The field electrode was supplied by negative polarizing voltage Upol. The emitting materials were In2O3:Sn and titanium films. As a result of applying Upol and illumination, electrons and photoelectrons are released and enter electron multiplier. Amplitude spectra of pulses were recorded by a multichannel analyser of pulse voltage. Energy analysis of electrons released from the samples was performed by the method of retarding field. Amplitude spectra at a given Upol and changing retarding field for titanium and oxide layers were compared. It was found that electron energy can exceed even 50eV. For both types of films the influence of illumination of electron emission induced by an electric field was also investigated.

Paper Details

Date Published: 18 September 1995
PDF: 9 pages
Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); doi: 10.1117/12.221214
Show Author Affiliations
Jadwiga Olesik, Pedagogical Univ. of Czestochowa (Poland)
Bogdan Calusinski, Pedagogical Univ. of Czestochowa (Poland)
Zygmunt Olesik, Pedagogical Univ. of Czestochowa (Poland)


Published in SPIE Proceedings Vol. 2638:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
John K. Lowell; Ray T. Chen; Jagdish P. Mathur, Editor(s)

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