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Proceedings Paper

Advanced optical characterization techniques for borophosphosilicate films
Author(s): Ronald A. Carpio; Jon Taylor
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Paper Abstract

FTIR spectra of borophosphosilicate (BPSG) films which are obtained by metal backed configurations are compared to those obtained by the conventional normal incidence transmission geometry. Sensitivity advantages are demonstrated for both hydrogen incorporation and dopant analyses. P-polarized measurements are explored for preferential excitation of vibrational modes. Reflectance measurements of BPSG films on silicon by FTIR and by the emerging techniques of spectroscopic ellipsometry (SE) both in the UV-visible and mid-IR spectral ranges are reviewed. The use of differential and derivative spectral data anlysis is illustrated for investigating structural and compositional changes which occur from film densification and in the course of film storage.

Paper Details

Date Published: 18 September 1995
PDF: 8 pages
Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); doi: 10.1117/12.221205
Show Author Affiliations
Ronald A. Carpio, SEMATECH (United States)
Jon Taylor, SEMATECH (United States)


Published in SPIE Proceedings Vol. 2638:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
John K. Lowell; Ray T. Chen; Jagdish P. Mathur, Editor(s)

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