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Proceedings Paper

A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry
Author(s): Q. T. Banh; T. Shioda
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Paper Abstract

Pseudo optical frequency comb using a high-speed frequency laser scanner and an optical resonator is generated as a virtual broadband lightsource for the time-domain 2D single-shot tomography and profilometry. High-speed laser scanner (40 kHz) is realized using a broadband semiconductor optical amplifier (SOA) whose individual wavelengths are consequently picked up by a conventional grating setup and a high speed polygon mirror. The performance of the pseudo frequency comb is confirmed by a measurement of a reference step-height sample with an optical zooming operation.

Paper Details

Date Published: 15 March 2016
PDF: 6 pages
Proc. SPIE 9754, Photonic Instrumentation Engineering III, 975419 (15 March 2016); doi: 10.1117/12.2211995
Show Author Affiliations
Q. T. Banh, Saitama Univ. (Japan)
SevenSix, Inc. (Japan)
T. Shioda, Saitama Univ. (Japan)


Published in SPIE Proceedings Vol. 9754:
Photonic Instrumentation Engineering III
Yakov G. Soskind; Craig Olson, Editor(s)

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