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Proceedings Paper

Uncertainty estimation in form error evaluation of freeform surfaces for precision metrology
Author(s): Xiangchao Zhang; Hong Xiao; Hao Zhang; Xiaoying He; Min Xu
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Paper Abstract

Freeform surfaces are widely used in precision components to realize novel functionalities. In order to evaluate the form qualities of the manufactured freeform parts, surface matching/fitting is required. The uncertainty of the obtained form deviations needs to be estimated to assess the reliability of form error evaluation. The GUM approach is extensively adopted for uncertainty assessment in precision metrology, but it is not suited for assessing the nonlinear matching/fitting problems of freeform models. In this paper a Monte-Carlo method is developed to estimate the uncertainty of the fitted position, shape and form error metrics. Based on the correlation analysis, the effects of objective functions in numerical optimization, noise amplitudes in measurement, shapes of freeform surfaces and so on are determined. Then the significant factors dominating the reliability of the fitted results can be identified. Henceforth the matching/fitting procedures can be arranged appropriately to reduce the uncertainty of the evaluation results and improve the reliability of freeform surface characterization.

Paper Details

Date Published: 26 January 2016
PDF: 7 pages
Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031G (26 January 2016); doi: 10.1117/12.2211994
Show Author Affiliations
Xiangchao Zhang, Fudan Univ. (China)
Hong Xiao, China Academy of Engineering Physics (China)
Hao Zhang, Fudan Univ. (China)
Xiaoying He, Fudan Univ. (China)
Min Xu, Fudan Univ. (China)


Published in SPIE Proceedings Vol. 9903:
Seventh International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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