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Proceedings Paper

Surface photovoltage analysis of iron contamination in silicon processing and the relation to gate oxide integrity
Author(s): Worth B. Henley
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Paper Abstract

Surface photovoltage (SPV), a contactless optical technique for measuring minority carrier lifetime, is used to quantify the relationship between silicon iron contamination level and thin gate oxide integrity. Iron concentration levels in the range of 1 X 1010 cm-3 to 5 X 1013 cm-3 are evaluated for oxide thicknesses of 8 to 20 nm. Ramp voltage electrical breakdown and time dependant dielectric breakdown measurement on the iron contaminated gate oxide capacitors are reported. Distinct iron contamination threshold limits based on defect density and gate oxide integrity evaluate cleaning efficiencies and metallic cross contamination effects during thermal processing contamination. Iron-silicide precipitation kinetics are investigated by the lifetime analysis procedure.

Paper Details

Date Published: 18 September 1995
PDF: 11 pages
Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995); doi: 10.1117/12.221194
Show Author Affiliations
Worth B. Henley, Univ. of South Florida (United States)


Published in SPIE Proceedings Vol. 2638:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
John K. Lowell; Ray T. Chen; Jagdish P. Mathur, Editor(s)

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