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Proceedings Paper

WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device
Author(s): Kuo-Chun Tseng; Shuo-Ting Hong; Te-Hsun Lin; Tzu-Han Chuang; Chien-Chung Fu
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Paper Abstract

Wire-grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance the brightness and improve the utilization rate of the backlight source. This paper proposes the design and application of a WGP device for an microelectromechanical system physical force sensor derived through an optical measurement method. Infrared (IR) light was served as the signal source, with the initial angle set incident to the WGP, which was fabricated on microstructures such as cantilever beam, thin-film or bridge structures. According to the operation principle, when a physical force affects the microstructures, the incident angle of the signal light changes, which easily produces different transmission signal values for detection by an IR photodetector. Therefore, the proposed system can be used for optical contactless sensing in physical force sensing modules. Furthermore, the WGP structure introduced in this paper was defined using laser interference lithography and deposited with Al by E-beam evaporation.

Paper Details

Date Published: 14 March 2016
PDF: 6 pages
Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97591E (14 March 2016); doi: 10.1117/12.2211917
Show Author Affiliations
Kuo-Chun Tseng, National Tsing Hua Univ. (Taiwan)
Shuo-Ting Hong, National Tsing Hua Univ. (Taiwan)
Te-Hsun Lin, National Tsing Hua Univ. (Taiwan)
Tzu-Han Chuang, National Tsing Hua Univ. (Taiwan)
Chien-Chung Fu, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9759:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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