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Proceedings Paper

Design, fabrication, and characterization of electrostatic microrelays
Author(s): Shuvo Roy; Mehran Mehregany
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Paper Abstract

This paper describes the development of electrostatically-actuated nickel microrelays. Device design is based on lateral comb-finger drives for actuation of the relay contact. The contact geometry is intended to reduce the 'ON' resistance and also prevent spontaneous closing of the relay. Planar microrelays, up to 15 micrometers thick, are batch fabricated using nickel surface micromachining which uses electroless plated nickel as the structural material, high-aspect- ratio positive resist lithography for the plating mold, and polysilicon as the sacrificial layer. The microfabricated relays were successfully actuated to investigate electrical contact attributes. Initial experiments reveal contact resistances to be around 15(Omega) and current densities up to 2mA/micrometers 2 without degradation.

Paper Details

Date Published: 15 September 1995
PDF: 10 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221184
Show Author Affiliations
Shuvo Roy, Case Western Reserve Univ. (United States)
Mehran Mehregany, Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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