Share Email Print
cover

Proceedings Paper

Measurement of static friction in mechanical couplings of articulated microrobots
Author(s): Richard Yeh; Kristofer S. J. Pister
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Force measurements from 3D polysilicon mechanisms under various loading conditions are presented. Force was measured using the deflection of polysilicon spring gauges with known dimensions and estimated elastic properties. Force measurements were made to determine the force required to overcome static friction when rotating hinged structures with and without external loading using a sliding mechanism. Both loaded and unloaded mechanisms display a wide statistical variation in friction force. Unloaded mechanisms require on average 1-5 (mu) N of force to move, whereas mechanisms manipulating 3.5 (mu) N loads require on average 1-10 (mu) N of force. These measurements are motivated by an effort to produce articulated microrobots, and progress in this area is also discussed.

Paper Details

Date Published: 15 September 1995
PDF: 11 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221182
Show Author Affiliations
Richard Yeh, Univ. of California/Los Angeles (United States)
Kristofer S. J. Pister, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

© SPIE. Terms of Use
Back to Top