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Proceedings Paper

Characterization of a surface micromachined pressure sensor array
Author(s): William P. Eaton; James H. Smith
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Paper Abstract

A surface micromachined pressure sensor array has been designed and fabricated. The sensors are based upon deformable, silicon nitride diaphragms with polysilicon piezoresistors. Absolute pressure is detected by virtue of reference pressure cavities underneath the diaphragms. For this type of sensor, design tradeoffs must be made among allowable diaphragm deflection, diaphragm size, and desireable pressure ranges. Several fabrication issues were observed and addressed. Offset voltage, sensitivity, and nonlinearity of 100 micrometers diameter sensors were measured.

Paper Details

Date Published: 15 September 1995
PDF: 9 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221177
Show Author Affiliations
William P. Eaton, Sandia National Labs. (United States)
James H. Smith, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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