Share Email Print
cover

Proceedings Paper

A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

Paper Details

Date Published: 15 March 2016
PDF: 7 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976002 (15 March 2016); doi: 10.1117/12.2211746
Show Author Affiliations
Song Xu, Texas A&M Univ. (United States)
Chih-Hsien Huang, Texas A&M Univ. (United States)
Jun Zou, Texas A&M Univ. (United States)


Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

© SPIE. Terms of Use
Back to Top