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A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
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Paper Abstract

Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

Paper Details

Date Published: 15 March 2016
PDF: 7 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976002 (15 March 2016); doi: 10.1117/12.2211746
Show Author Affiliations
Song Xu, Texas A&M Univ. (United States)
Chih-Hsien Huang, Texas A&M Univ. (United States)
Jun Zou, Texas A&M Univ. (United States)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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