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Proceedings Paper

Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects
Author(s): Youngmin Kim; Dean P. Neikirk
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Paper Abstract

A monolithically integrated Fabry-Perot cavity pressure transducer has been fabricated using micromachining techniques that are fully compatible with silicon IC processing technology. Surface micromachining can produce a high quality micro cavity without the wafer bonding process that has been commonly used in previously fabricate Fabry-Perot pressure transducers. Dielectric film stacks consisting of layers of silicon nitride and silicon dioxide were used as mirrors. An air gap cavity was formed by selectively etching a sacrifical polysilicon layer. Remote pressure measurement was demonstrated using the micromachined Fabry-Perot cavity and a multimode optical fiber interconnect. The measured response of the sensor has been compared with theoretical simulation which takes into account the averaging effect caused by the shape of the deflected mirror in the cavity.

Paper Details

Date Published: 15 September 1995
PDF: 8 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221174
Show Author Affiliations
Youngmin Kim, Univ. of Texas/Austin (United States)
Dean P. Neikirk, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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