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Proceedings Paper

SiO2-glass drilling by short-pulse CO2 laser with controllable pulse-tail energy
Author(s): Kazuyuki Uno; Takuya Yamamoto; Miyu Watanabe; Tetsuya Akitsu; Takahisa Jitsuno
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Paper Abstract

We developed a longitudinally excited CO2 laser that produces a short laser pulse with the almost same spike-pulse energy of about 0.8 mJ and the controllable pulse-tail energy of 6.33−23.08 mJ. The laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 9 mm, a pulse power supply, a step-up transformer, a storage capacitance and a spark-gap switch. The dependence of SiO2 glass drilling on the fluence and the number was investigated by four types of short-pulse CO2 lasers. In this work, the effective short laser pulse with the spike pulse energy of 0.8 mJ for SiO2 glass drilling was the laser pulse with the pulse tail energy of 19.88 mJ, and produces the drilling depth per the fluence of 124 μm/J/cm2.

Paper Details

Date Published: 14 March 2016
PDF: 6 pages
Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 973519 (14 March 2016); doi: 10.1117/12.2211565
Show Author Affiliations
Kazuyuki Uno, Univ. of Yamanashi (Japan)
Takuya Yamamoto, Univ. of Yamanashi (Japan)
Miyu Watanabe, Univ. of Yamanashi (Japan)
Tetsuya Akitsu, Univ. of Yamanashi (Japan)
Takahisa Jitsuno, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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