Share Email Print
cover

Proceedings Paper

Monolithic multiple axis accelerometer design in standard CMOS
Author(s): Brett Warneke; Eric G. Hoffman; Kristofer S. J. Pister
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Using a single maskless postprocessing step we have developed an accelerometer in a standard commercial CMOS process capable of a sensitive axis parallel or perpendicular to the die surface. Out postprocess is realized using xenon difluoride (XeF2) as a bulk etchant. The combination of this etchant and the standard CMOS process allows realization of cantilevers with piezoresistive sensors in all spacial coordinates from a widely-accessible source and at a minimal cost. Fabrication of accelerometers for all three axes and associated electronics on a single piece of silicon reduces the cost of 3D acceleration detection while increasing sensor reliability.

Paper Details

Date Published: 15 September 1995
PDF: 8 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221155
Show Author Affiliations
Brett Warneke, Univ. of California/Los Angeles (United States)
Eric G. Hoffman, Univ. of California/Los Angeles (United States)
Kristofer S. J. Pister, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

© SPIE. Terms of Use
Back to Top