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Proceedings Paper

Ellipsometric measurements for thin film based sensor systems
Author(s): Ratchapak Chitaree; V. Murphy; K. Weir; Andrew W. Palmer; Kenneth T. V. Grattan; Brian D. MacCraith
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Paper Abstract

The application of a highly birefringent fiber polarization modulation technique for ellipsometric measurements on sol-gel thin films is described. The ability of the system to determine the ellipsometric parameters of thin films is demonstrated. The system is then used to monitor the ellipsometric parameters of thin films on exposure to a perturbing environment of humidity and pressure. The potential of the system for application in chemical sensor systems is indicated and discussed.

Paper Details

Date Published: 21 September 1995
PDF: 7 pages
Proc. SPIE 2509, Smart Structures: Optical Instrumentation and Sensing Systems, (21 September 1995); doi: 10.1117/12.221105
Show Author Affiliations
Ratchapak Chitaree, City Univ. (United Kingdom)
V. Murphy, Dublin City Univ. (Ireland)
K. Weir, City Univ. (United Kingdom)
Andrew W. Palmer, City Univ. (United Kingdom)
Kenneth T. V. Grattan, City Univ. (United Kingdom)
Brian D. MacCraith, Dublin City Univ. (Ireland)

Published in SPIE Proceedings Vol. 2509:
Smart Structures: Optical Instrumentation and Sensing Systems
Deepak G. Uttamchandani, Editor(s)

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