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Proceedings Paper

Optoelectronical gas sensors based on surface plasmon resonance in Si-structure
Author(s): Petr I. Nikitin; Mikhail V. Valeiko; Anatoli A. Beloglazov
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Paper Abstract

The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded.

Paper Details

Date Published: 20 September 1995
PDF: 8 pages
Proc. SPIE 2506, Air Pollution and Visibility Measurements, (20 September 1995); doi: 10.1117/12.221004
Show Author Affiliations
Petr I. Nikitin, General Physics Institute (Russia)
Mikhail V. Valeiko, General Physics Institute (Russia)
Anatoli A. Beloglazov, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 2506:
Air Pollution and Visibility Measurements
Peter Fabian; Volker Klein; Maurus Tacke; Konradin Weber; Christian Werner, Editor(s)

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