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Proceedings Paper

Debris-free soft x-ray generation using a liquid droplet laser-plasma target
Author(s): Hans M. Hertz; Lars Rymell; Magnus Berglund; Lars Malmqvist
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Paper Abstract

We describe the use of small liquid droplets as target for laser-plasma soft x-ray and EUV generation. Using a table-top laser, this < 15 micrometers diameter plasma source typically produces line radiation with approximately 1(DOT)1012 photons/ster-line-pulse in the water-window wavelength range. The major adcvantages of the source is that it is practically debris free. We discuss applications of the source to soft x-ray microscopy and lithography.

Paper Details

Date Published: 18 September 1995
PDF: 6 pages
Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); doi: 10.1117/12.221000
Show Author Affiliations
Hans M. Hertz, Lund Institute of Technology (Sweden)
Lars Rymell, Lund Institute of Technology (Sweden)
Magnus Berglund, Lund Institute of Technology (Sweden)
Lars Malmqvist, Lund Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 2523:
Applications of Laser Plasma Radiation II
Martin C. Richardson; George A. Kyrala, Editor(s)

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