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Proceedings Paper

Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target
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Paper Abstract

Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 micrometers , which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 micrometers wavelength or 20 J for 1.05 micrometers . To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

Paper Details

Date Published: 18 September 1995
PDF: 10 pages
Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); doi: 10.1117/12.220997
Show Author Affiliations
Henryk Fiedorowicz, Military Univ. of Technology (Poland)
Andrzej Bartnik, Military Univ. of Technology (Poland)
Miroslaw Szczurek, Military Univ. of Technology (Poland)
Piotr Parys, Institute of Plasma Physics and Laser Microfusion (Poland)
Peter M. Celliers, Lawrence Livermore National Lab. (United States)
Luiz Barroca Da Silva, Lawrence Livermore National Lab. (United States)
Stanley Mrowka, Lawrence Livermore National Lab. (United States)
C. Brent Dane, Lawrence Livermore National Lab. (United States)
Dennis L. Matthews, Lawrence Livermore National Lab. (United States)
Joseph A. Abate, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 2523:
Applications of Laser Plasma Radiation II
Martin C. Richardson; George A. Kyrala, Editor(s)

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