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Proceedings Paper

Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
Author(s): Allyn Jackson
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Paper Abstract

There are significant advantages of using the ReticleSense™ Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.

Paper Details

Date Published: 4 September 2015
PDF: 7 pages
Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610Y (4 September 2015); doi: 10.1117/12.2209736
Show Author Affiliations
Allyn Jackson, CyberOptics Corp. (United States)


Published in SPIE Proceedings Vol. 9661:
31st European Mask and Lithography Conference
Uwe F.W. Behringer; Jo Finders, Editor(s)

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