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Proceedings Paper

Drilling a nanohole on the 60nm thick Au film using 200 keV electron beam irradiation
Author(s): Seong Soo Choi; Myoung Jin Park; Sung In Kim; Jung Ho Yoo; Kyung Jin Park; Yong-Sang Kim; Namkyoo Park
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Proc. SPIE 9725, Frontiers in Biological Detection: From Nanosensors to Systems VIII, ; doi: 10.1117/12.2209617
Show Author Affiliations
Seong Soo Choi, Sun Moon Univ. (Korea, Republic of)
Myoung Jin Park, Sun Moon Univ. (Korea, Republic of)
Sung In Kim, National Nanofab Ctr. (Korea, Republic of)
Jung Ho Yoo, National Nanofab Ctr. (Korea, Republic of)
Kyung Jin Park, National Nanofab Ctr. (Korea, Republic of)
Yong-Sang Kim, Sungkyunkwan Univ. (Korea, Republic of)
Namkyoo Park, Seoul National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 9725:
Frontiers in Biological Detection: From Nanosensors to Systems VIII
Benjamin L. Miller; Brian T. Cunningham, Editor(s)

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