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Proceedings Paper

Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors
Author(s): S. Rombach; M. Marx; S. Gu-Stoppel; Y. Manoli
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Paper Abstract

This work presents an integrated closed-loop driving circuit for previously reported PZT resonant micro-mirrors, which is based on embedded capacitive position sensors for minimizing the system footprint. Signals with a high SNR of 84 dB were measured, when the mechanical scan angle of the micro-mirror was 2◦, so that high controlling resolution of 14 bit for the complete motion range of the mirror is enabled. The total power consumption of the closed-loop system is only 0.86mW. Measurement results of the closed-loop driven micromirror system are presented, demonstrating its competitiveness due to the great reliability, high precision and low-power consumption. Additionally, the implementation and performance of a self-resonant loop is discussed. Finally, the fabrication, temperature dependency and performance of embedded capacitive position sensors for single and dual axis PZT resonant micro-mirrors is evaluated and presented.

Paper Details

Date Published: 15 March 2016
PDF: 11 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600Q (15 March 2016); doi: 10.1117/12.2209573
Show Author Affiliations
S. Rombach, Univ. of Freiburg (Germany)
M. Marx, Univ. of Freiburg (Germany)
S. Gu-Stoppel, Fraunhofer-Institut für Siliziumtechnologie (Germany)
Y. Manoli, Univ. of Freiburg (Germany)
Hanh-Schickard Institute of Micromachining and Information Technology (Germany)


Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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