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Proceedings Paper

Optically pumped 1550nm wavelength tunable MEMS VCSEL
Author(s): Hitesh K. Sahoo; Thor Ansbæk; Luisa Ottaviano; Elizaveta S. Semenova; Ole Hansen; Kresten Yvind
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Paper Abstract

The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with an enclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells are bonded to the SOI and the last mirror is made from the deposition of dielectric materials. The design brings in flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results from the simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweep speed and bandwidth.

Paper Details

Date Published: 15 March 2016
PDF: 10 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600X (15 March 2016); doi: 10.1117/12.2209563
Show Author Affiliations
Hitesh K. Sahoo, Technical Univ. of Denmark (Denmark)
Thor Ansbæk, OCTLIGHT ApS (Denmark)
Luisa Ottaviano, Technical Univ. of Denmark (Denmark)
Elizaveta S. Semenova, Technical Univ. of Denmark (Denmark)
Ole Hansen, Technical Univ. of Denmark (Denmark)
Kresten Yvind, Technical Univ. of Denmark (Denmark)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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