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Proceedings Paper

Quartz enhanced photoacoustic leak sensor for mechatronic components
Author(s): A. Sampaolo; P. Patimisco; M. Giglio; P. P. Calabrese; L. Chieco; G. Scamarcio; F. K. Tittel; V. Spagnolo
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Paper Abstract

We report the first demonstration of a leak sensor based on a mid-IR quartz-enhanced photoacoustic (QEPAS) spectroscopic technique. A QEPAS sensor was integrated in a vacuum seal test station for mechatronic components. The laser source is a quantum cascade laser emitting at 10.56 μm, resonant with a strong absorption band of sulfur hexafluoride (SF6), which was selected as target gas for leak detection. The minimum detectable concentration of the QEPAS sensor is 6.9 ppb with an integration time of 1 s. This detection sensitivity allowed to measure SF6 leak flows as low as 3x10-5 standard cm3.

Paper Details

Date Published: 13 February 2016
PDF: 6 pages
Proc. SPIE 9755, Quantum Sensing and Nano Electronics and Photonics XIII, 97550D (13 February 2016); doi: 10.1117/12.2209526
Show Author Affiliations
A. Sampaolo, Univ. e Politecnico di Bari (Italy)
Rice Univ. (United States)
P. Patimisco, Univ. e Politecnico di Bari (Italy)
M. Giglio, Univ. e Politecnico di Bari (Italy)
P. P. Calabrese, Univ. e Politecnico di Bari (Italy)
L. Chieco, MASMEC S.p.A. (Italy)
G. Scamarcio, Univ. e Politecnico di Bari (Italy)
F. K. Tittel, Rice Univ. (United States)
V. Spagnolo, Univ. e Politecnico di Bari (Italy)


Published in SPIE Proceedings Vol. 9755:
Quantum Sensing and Nano Electronics and Photonics XIII
Manijeh Razeghi, Editor(s)

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