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Proceedings Paper

Bimorph actuators in thick SiO2 for photonic alignment
Author(s): Kai Wu; Tjitte-Jelte Peters; Marcel Tichem; Ferry Postma; Albert Prak; Kerstin Wörhoff; Arne Leinse
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Paper Abstract

This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 µm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

Paper Details

Date Published: 15 March 2016
PDF: 9 pages
Proc. SPIE 9753, Optical Interconnects XVI, 975311 (15 March 2016); doi: 10.1117/12.2209499
Show Author Affiliations
Kai Wu, Technische Univ. Delft (Netherlands)
Tjitte-Jelte Peters, Technische Univ. Delft (Netherlands)
Marcel Tichem, Technische Univ. Delft (Netherlands)
Ferry Postma, LioniX BV (Netherlands)
Albert Prak, LioniX BV (Netherlands)
Kerstin Wörhoff, LioniX BV (Netherlands)
Arne Leinse, LioniX BV (Netherlands)


Published in SPIE Proceedings Vol. 9753:
Optical Interconnects XVI
Henning Schröder; Ray T. Chen, Editor(s)

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