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Proceedings Paper

Stacked double-layer nanomembrane Fano modulators
Author(s): Yichen Shuai; Deyin Zhao; Corey Stambaugh; John Lawall; Weidong Zhou
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Paper Abstract

We report a novel bi-layer photonic crystal slab (PCS) Fano modulator via a coupled double-layer Si nanomembrane (SiNM) capacitor like structure. Surface normal incident light intensity modulation near 1500nm was achieved by carrier accumulation induced resonance spectral shifting. Device performance simulation suggests the opportunity for high speed modulation exceeding GHz with 20μm × 20μm device size.

Paper Details

Date Published: 14 March 2016
PDF: 6 pages
Proc. SPIE 9752, Silicon Photonics XI, 975205 (14 March 2016); doi: 10.1117/12.2209386
Show Author Affiliations
Yichen Shuai, National Institute of Standards and Technology (United States)
Deyin Zhao, The Univ. of Texas at Arlington (United States)
Corey Stambaugh, National Institute of Standards and Technology (United States)
John Lawall, National Institute of Standards and Technology (United States)
Weidong Zhou, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 9752:
Silicon Photonics XI
Graham T. Reed; Andrew P. Knights, Editor(s)

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