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Proceedings Paper

Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review
Author(s): Martin Ebermann; Norbert Neumann; Karla Hiller; Mario Seifert; Marco Meinig; Steffen Kurth
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Paper Abstract

Many application fields of infrared spectroscopy require small, robust and transportable spectrometers, which are considerable less costly than existing products. Therefore microspectrometer technologies are rapidly emerging and many research groups spend effort on this. Compared to other kinds of devices, micromachined tunable Fabry-Pérot filters are best suited in terms of miniaturization and optical throughput. This paper gives a review of μFP filters for infrared spectroscopy. Different approaches from several groups are compared. Optical performance parameters like wavelength tuning range, spectral resolution and aperture size as well as complexity of fabrication and costs are discussed.

Paper Details

Date Published: 15 March 2016
PDF: 20 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600H (15 March 2016); doi: 10.1117/12.2209288
Show Author Affiliations
Martin Ebermann, InfraTec GmbH (Germany)
Norbert Neumann, InfraTec GmbH (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Mario Seifert, Technische Univ. Chemnitz (Germany)
Marco Meinig, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Steffen Kurth, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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