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Proceedings Paper

Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air
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Paper Abstract

We develop an experiment of laser-matter interaction in air environment with ultrashort pulses of 12 fs in the context of micromachining. From post-mortem analysis of the sample, we determine the ablation thresholds of fused silica and sapphire exposed to single 12-fs laser pulse. We also analyze the evolution of macroscopic ablation quantities, taking into account the role of nonlinear propagation effects in air prior the target.

Paper Details

Date Published: 14 March 2016
PDF: 11 pages
Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350H (14 March 2016); doi: 10.1117/12.2208035
Show Author Affiliations
C. Pasquier, Aix-Marseille Univ., CNRS, Lasers, Plasmas et Procédés Photoniques (France)
M. Sentis, Aix-Marseille Univ., CNRS, Lasers, Plasmas et Procédés Photoniques (France)
O. Utéza, Aix-Marseille Univ., CNRS, Lasers, Plasmas et Procédés Photoniques (France)
N. Sanner, Aix-Marseille Univ., CNRS, Lasers, Plasmas et Procédés Photoniques (France)


Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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