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Proceedings Paper

Femtosecond pulsed light polarization induced effects in direct laser writing 3D nanolithography
Author(s): Mangirdas Malinauskas; Sima Rekštytė; Tomas Jonavičius; Darius Gailevičius; Vygantas Mizeikis; Eugene Gamaly; Saulius Juodkazis
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Paper Abstract

We demonstrate how the coupling between (i) polarization of the writing laser beam, (ii) tight focusing and (iii) heat conduction affects the size, shape and absorption in the laser-affected area and therefore the polymerization process. It is possible to control the sizes of 3D laser-produced structure at the scale of several nanometers. Specifically we were able to tune the aspect ratio of 3D suspended line up to 20% in hybrid SZ2080 resist. The focal spot of tightly focused linearly polarized beam has an elliptical form with the long axis in the field direction. It is shown here that this effect is enhanced by increase in the electronic heat conduction when polarization coincide with temperature gradient along with the absorption. Overlapping of three effects (i- iii) results in the difference of several tens of nanometers between two axes of the focal ellipse. Narrow line appears when polarization and scan direction coincide, while the wide line is produced when these directions are perpendicular to each other. The effect scales with the laser intensity giving a possibility to control the width of the structure on nanometer scale as demonstrated experimentally in this work. These effects are of general nature and can be observed in any laser-matter interaction experiments where plasma produced by using tight focusing of linear-polarized light.

Paper Details

Date Published: 4 March 2016
PDF: 15 pages
Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, 973608 (4 March 2016); doi: 10.1117/12.2207448
Show Author Affiliations
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)
Sima Rekštytė, Vilnius Univ. (Lithuania)
Tomas Jonavičius, Vilnius Univ. (Lithuania)
Darius Gailevičius, Vilnius Univ. (Lithuania)
Vygantas Mizeikis, Shizuoka Univ. (Japan)
Eugene Gamaly, The Australian National Univ. (Australia)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 9736:
Laser-based Micro- and Nanoprocessing X
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)

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