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Proceedings Paper

Reversible nano-lithography for commercial approaches
Author(s): Jae Hong Park; Hyun Ik Jang; Woo Choong Kim; Hae Su Yun; Jun Yong Park; Seok Woo Jeon; Hee Yeoun Kim; Chi Won Ahn
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Paper Abstract

The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.

Paper Details

Date Published: 1 April 2016
PDF: 6 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 977723 (1 April 2016); doi: 10.1117/12.2205065
Show Author Affiliations
Jae Hong Park, Korea National NanoFab Ctr. (Korea, Republic of)
Hyun Ik Jang, Korea National NanoFab Ctr. (Korea, Republic of)
Woo Choong Kim, Korea National NanoFab Ctr. (Korea, Republic of)
Hae Su Yun, Korea National NanoFab Ctr. (Korea, Republic of)
Jun Yong Park, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Seok Woo Jeon, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Hee Yeoun Kim, Korea National NanoFab Ctr. (Korea, Republic of)
Chi Won Ahn, Korea National NanoFab Ctr. (Korea, Republic of)


Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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