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Proceedings Paper

Status of accurate three-dimensional SEM measurements at the nanometer scale
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Proc. SPIE 9636, Scanning Microscopies 2015, 963604; doi: 10.1117/12.2203411
Show Author Affiliations
András E. Vladár, National Institute of Standards and Technology (United States)
Vipin Tondare
John S. Villarrubia, National Institute of Standards and Technology (United States)
Michael T. Postek, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 9636:
Scanning Microscopies 2015
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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