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Proceedings Paper

Back-side-illuminated 1.4um pixel with a vertically pinned photodiode based on hole collection, PMOS readout chain and active side-wall passivation
Author(s): Bastien Mamdy; François Roy; Nayera Ahmed; Guo-Neng Lu
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Paper Abstract

To further improve the characteristics of CMOS image sensors (CIS), we propose a back-side illuminated pixel integrating a vertically pinned and P-type photodiode (which collects holes) and PMOS readout circuitry. It has been designed in a 1.4μm-pitch, a two-transistor (2T) shared readout architecture and fabricated in a combined 65nm and 90nm technology. The vertically pinned photodiode takes up almost the entire volume of the pixel, allowing a full well capacity (FWC) exceeding 7000h+. With a conversion factor around 120μV/h+, the output swing approaching 1V is achieved on the column voltage. The pixel also integrates capacitive deep trench isolation (CDTI) to tackle electrical and optical crosstalk issues. The effective passivation of trench interface by CDTI bias control is demonstrated for a hole-based pixel. As expected, PMOS transistors have much lower trapping noise compared to NMOS counterparts. The PMOS source follower has an average temporal noise of 195μV, mainly dominated by thermal noise contribution.

Paper Details

Date Published: 15 October 2015
PDF: 6 pages
Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96742S (15 October 2015); doi: 10.1117/12.2202746
Show Author Affiliations
Bastien Mamdy, STMicroelectronics (France)
Institut des Nanotechnologies de Lyon, Univ. Claude Bernard Lyon 1 (France)
François Roy, STMicroelectronics (France)
Nayera Ahmed, STMicroelectronics (France)
Institut des Nanotechnologies de Lyon, Univ. Claude Bernard Lyon 1 (France)
Guo-Neng Lu, Institut des Nanotechnologies de Lyon, Univ. Claude Bernard Lyon 1 (France)


Published in SPIE Proceedings Vol. 9674:
AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology
Haimei Gong; Nanjian Wu; Yang Ni; Weibiao Chen; Jin Lu, Editor(s)

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