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Proceedings Paper

Electron-beam induced diamond-like-carbon passivation of plasmonic devices
Author(s): Eugeniu Balaur; Catherine Sadatnajafi; Daniel Langley; Jiao Lin; Shan Shan Kou; Brian Abbey
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Paper Abstract

Engineered materials with feature sizes on the order of a few nanometres offer the potential for producing metamaterials with properties which may differ significantly from their bulk counterpart. Here we describe the production of plasmonic colour filters using periodic arrays of nanoscale cross shaped apertures fabricated in optically opaque silver films. Due to its relatively low loss in the visible and near infrared range, silver is a popular choice for plasmonic devices, however it is also unstable in wet or even ambient conditions. Here we show that ultra-thin layers of Diamond-Like Carbon (DLC) can be used to prevent degradation due to oxidative stress, ageing and corrosion. We demonstrate that DLC effectively protects the sub-micron features which make up the plasmonic colour filter under both atmospheric conditions and accelerated aging using iodine gas. Through a systematic study we confirm that the nanometre thick DLC layers have no effect on the device functionality or performance.

Paper Details

Date Published: 22 December 2015
PDF: 7 pages
Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 966817 (22 December 2015); doi: 10.1117/12.2202567
Show Author Affiliations
Eugeniu Balaur, La Trobe Univ. (Australia)
Catherine Sadatnajafi, La Trobe Univ. (Australia)
Daniel Langley, La Trobe Univ. (Australia)
Jiao Lin, RMIT Univ. (Australia)
Shan Shan Kou, La Trobe Univ. (Australia)
Brian Abbey, La Trobe Univ. (Australia)

Published in SPIE Proceedings Vol. 9668:
Micro+Nano Materials, Devices, and Systems
Benjamin J. Eggleton; Stefano Palomba, Editor(s)

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