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Proceedings Paper

A highly-sensitive NaCl concentration sensor based on a compact silicon-on-insulator micro-ring resonator
Author(s): Jie Zhou; Wanjun Wang; Yiqun Wang; Junbo Feng; Jin Guo
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Paper Abstract

Silicon photonics circuit has been widely investigated in recent years, due to its advantage in the small footprint, high density integration and compatible with CMOS pilot line. In this paper, a compact, highly-sensitivity NaCl concentration sensor is experimentally demonstrated, based on the micro-ring resonators. The sensor circuit is composed of grating couplers, bus waveguide and micro-ring resonators. The width of optical waveguides is 450nm, with a thickness of 220nm. The chip was fabricated in imec through the ePIXfab multi-project wafer service supported by our group, which is compatible with the CMOS process line. The chip shows high sensitivity, as high as of more than 80nm/RIU, which corresponding to a detection limit of 1.6e-4 by using optical spectrum analyzer.

Paper Details

Date Published: 15 October 2015
PDF: 4 pages
Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96742F (15 October 2015); doi: 10.1117/12.2201034
Show Author Affiliations
Jie Zhou, China Electronics Technology Group Corp. (China)
Wanjun Wang, China Electronics Technology Group Corp. (China)
Yiqun Wang, China Electronics Technology Group Corp. (China)
Junbo Feng, China Electronics Technology Group Corp. (China)
Jin Guo, China Electronics Technology Group Corp. (China)


Published in SPIE Proceedings Vol. 9674:
AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology
Haimei Gong; Nanjian Wu; Yang Ni; Weibiao Chen; Jin Lu, Editor(s)

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