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Proceedings Paper

Analysis of optical flat flatness measuring method with phase-shifting laser interferometer
Author(s): Xing-yu Yao
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Paper Abstract

Flatness of the optical flat measurement mainly has two methord: first is laser plane interferometer, second is the Phase-shifting Laser Interferometer. The two methods were compared by analysis. For the detection of high precision optical flat, expounds the principle and method of Phase-shifting Laser Interferometer. Uncertainty analysis was carried out to validate the approach, meet the flat verification regulation. The method is feasible.

Paper Details

Date Published: 8 October 2015
PDF: 4 pages
Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96771Y (8 October 2015); doi: 10.1117/12.2199905
Show Author Affiliations
Xing-yu Yao, Liaoning Institute of Measurement (China)


Published in SPIE Proceedings Vol. 9677:
AOPC 2015: Optical Test, Measurement, and Equipment
Sen Han; Jonathan D. Ellis; Junpeng Guo; Yongcai Guo, Editor(s)

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